Semiconductor

Semiconductor

Your processes deserve
the best possible components.

The semiconductor market is under constant pressure to drive further development in terms of precision, purity and quality of the materials used. That is why you have come to the right place to equip your processes with the best possible components.

For this purpose we supply components for all types of equipment and wafer sizes up to 450 mm

Consumables

Consumables are spare / wear parts for etch, CVD and PVD processes, which are usually produced in listening quantities >20 pcs. /month), because they are exposed to processes, which lead to increased use.

This includes e.g.

  • Insert / Focus Rings
  • Shower Heads
  • Pocketwafer / Wafer Carrier
  • Susceptors

Equipment parts / special components

Here very often a close cooperation with our customers comes into play to find together the optimal solution and technical implementation.

  • Development
  • Prototype
  • Series product
  • Continuous further development
  • Long-term success and optimization

Si boats

With more than 500 boats (steadily increasing) in the market, leading chip manufacturers worldwide rely on our boats and have been able to optimize their processes, increase yields and thus reduce costs.

Due to our unique manufacturing technology, we can offer you the following advantages:

  • Interchangeable parts: Any component, be it base plate, top plate or individual rods, can be replaced.
  • We adapt the wafer contact to your process. There are a number of possibilities for this, which we have developed and optimized over the past 10 years.

IN THE RESULT THIS MEANS:

  • Less slip lines
  • Fewer scratches
  • more yield
  • less costs

All our boats are designed in such a way that they can be used on all common equipment, such as ASM, TEL, KE, … without any adjustments.

We will find the optimal boat for your process.

  • Vertical boats / shell boats
  • Horizontal boats:
    • Short- or Longfinger
    • 3- or 4- Rod
    • Special boats (customized designs)

The application areas cover all processes:

  • Oxidation
  • Annealing
  • Poly and Nitride Coating
  • Special Customer Process

Additional furnace equipment

Silicon tubes for vertical and horizontal furnance processes

Thanks to a unique joining technology (joining of several tube segments) we can realize any length and diameter. With a special post-treatment the tubes are also gas-tight.

Pedestals

Suitable and optimized for each type of boat we can also supply the appropriate pedestal. Here we also use the special connection technology, which is also used for the boats.

Injectors

Optimal replacement for common SiC and quartz injectors. Longer service life. > Less maintenance. > Higher throughput.